For seal-material compatibility, first identify the temperature, solvents and gases the seal will encounter. Verify the actual process conditions after replacement and compare the applicable pump-down and pressure-hold records.
For seal materials, check temperature, solvent and gas compatibility and validate actual conditions after replacement. Use these leak or evacuation checks as the trial objective. Fix chamber temperature, isolation-valve state, gauge location and pre-service empty-chamber baseline.
Identify calibrated absolute-pressure channels and sample-temperature measurements; record valve state, pump condition and the timing of each pump-down or isolated-hold observation.
Compare empty and actual-load curves under the same conditions, then repeat after the relevant service. Relate pressure behaviour to vapour release, oxygen where measured, and the drying endpoint.
Separate pump performance, line resistance, sample outgassing and seal leakage before assigning a cause. Retest the restored baseline and loaded process before releasing the repaired configuration.
Compare empty and loaded pump-down curves to distinguish leaks, sample outgassing and vapour load; one pressure-rise result cannot by itself establish seal failure.
Record pressure-hold behaviour at the same temperature and isolation conditions, then inspect door seals, valves, joints, gauge lines and the pump.
Repeat baseline and loaded checks after servicing or seal replacement; retain before-and-after curves to confirm recovery of the drying endpoint and atmosphere stability.
A validation report should identify sensors and calibration, show raw curves and material results, and document deviations and the decision to accept or revise the process.
Candidate models in the current catalogue: ESC-VO1000-T6, ESC-VO125-T6, ESC-VO216-T6, ESC-VO27-T6. These are comparison candidates, subject to the process checks above.
The following specifications apply only to the models listed:
